Patents by Inventor Semyon Shertinsky

Semyon Shertinsky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck with improved erosion resistance
    Patent number: 6023405
    Abstract: An electrostatic chuck (20) for holding a substrate (45) is described. One version of the chuck (20) suitable for mounting on a base (25), comprises (i) an electrostatic member (33) having an electrode (50) therein, and (ii) an electrical lead (60) extending through the base (25) to electrically engage the electrode (50) of the electrostatic member (33). When the chuck (20) is used to hold a substrate (45) in a process chamber (80) containing erosive process gas, the substrate (45) covers and substantially protects the electrical lead (60) from erosion by the erosive process gas. In a preferred version of the chuck (20), an electrical connector (55) forming an integral extension of the electrode (50), electrically connects the electrode (50) to a voltage supply terminal (70) used to operate the chuck (20).
    Type: Grant
    Filed: February 17, 1998
    Date of Patent: February 8, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil, Ron Northrup, Semyon Shertinsky, Sasson Somekh
  • Electrostatic chuck with improved erosion resistance
    Patent number: 5822171
    Abstract: An electrostatic chuck (20) for holding a substrate (45) is described. One version of the chuck (20) suitable for mounting on a base (25), comprises (i) an electrostatic member (33) having an electrode (50) therein, and (ii) an electrical lead (60) extending through the base (25) to electrically engage the electrode (50) of the electrostatic member (33). When the chuck (20) is used to hold a substrate (45) in a process chamber (80) containing erosive process gas, the substrate (45) covers and substantially protects the electrical lead (60) from erosion by the erosive process gas. In a preferred version of the chuck (20), an electrical connector (55) forming an integral extension of the electrode (50), electrically connects the electrode (50) to a voltage supply terminal (70) used to operate the chuck (20).
    Type: Grant
    Filed: March 24, 1995
    Date of Patent: October 13, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspiel, Ron Northrup, Semyon Shertinsky, Sasson Somekh