Abstract: The present invention provides a method and system for high dynamic range image measurement which is configured to control the light intensity distribution through an optical modulating switch for adjusting the intensity of the light passing therethrough so as to control the light intensity distribution of the light projecting on an object or of the object light being sensed by a photo detector for preventing the optical sensing signals of the photo detector from over-saturating. After that, the optical sensing signals are compensated according to the optical intensity distribution modulated by the optical modulating switch so as to obtain an image data with high dynamic range.

Abstract: The present invention provides a scatterfield microscopical measuring method and apparatus, which combine scatterfield detecting technology into microscopical device so that the microscopical device is capable of measuring the sample whose dimension is under the limit of optical diffraction. The scatterfield microscopical measuring apparatus is capable of being controlled to focus uniform and collimated light beam on back focal plane of an objective lens disposed above the sample. By changing the position of the focus position on the back focal plane, it is capable of being adjusted to change the incident angle with respect to the sample.

Abstract: A system for constructing high resolution images includes a beam splitter assembly, a light intensity modulator, an image capturing module and an image processing module. The beam splitter assembly is utilized to reflect a light beam generated from a light source generating device and generate a splitting beam. The light intensity modulator is utilized to modulate the intensity of the splitting beam to generate a modulating beam, which includes a predetermined noise. The modulating beam is emitted onto an object to generate a modulating image. The image capturing module is utilized to obtain a plurality of modulating images. The image processing module is utilized to analyze the modulating images to generate a high resolution image.

Abstract: A system for constructing a high dynamic range image includes a light generating device, a reflective mirror device, a controller, an image capturing device and an image processing module. The light generating device generates a light beam. The reflective mirror device directs the light beam to an object. The controller generates an intensity controlling signal for controlling the light generating device to modulate an intensity of the light beam in accordance with illuminating parameters, and to generate a direction controlling signal for controlling a reflection direction of the reflective mirror device. The image capturing device obtains an original image of the object or a modulated image of the object. The image processing module analyzes the original image to generate the illuminating parameters, or to construct a high dynamic range image of the object in accordance with the modulated image and the illuminating parameters.

Abstract: The present invention provides a method and system for high dynamic range image measurement which is configured to control the light intensity distribution through an optical modulating switch for adjusting the intensity of the light passing therethrough so as to control the light intensity distribution of the light projecting on an object or of the object light being sensed by a photo detector for preventing the optical sensing signals of the photo detector from over-saturating. After that, the optical sensing signals are compensated according to the optical intensity distribution modulated by the optical modulating switch so as to obtain an image data with high dynamic range.

Abstract: A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.

Abstract: A reflective scatterometer capable of measuring a sample is provided. The reflective scatterometer includes a paraboloid mirror, a light source, a first reflector, a second reflector and a detector. The paraboloid mirror has an optical axis and a parabolic surface, wherein the sample is disposed on the focal point of the parabolic surface and the normal direction of the sample is parallel with the optical axis. A collimated beam generated from the light source is reflected by the first reflector to the parabolic surface and then is reflected by the parabolic surface to the sample to form a first diffracted beam. The first diffracted beam is reflected by the parabolic surface to the second reflector and is then reflected by the second reflector to the detector.

Abstract: A reflective scatterometer capable of measuring a sample is provided. The reflective scatterometer includes a paraboloid mirror, a light source, a first reflector, a second reflector and a detector. The paraboloid mirror has an optical axis and a parabolic surface, wherein the sample is disposed on the focal point of the parabolic surface and the normal direction of the sample is parallel with the optical axis. A collimated beam generated from the light source is reflected by the first reflector to the parabolic surface and then is reflected by the parabolic surface to the sample to form a first diffracted beam. The first diffracted beam is reflected by the parabolic surface to the second reflector and is then reflected by the second reflector to the detector.

Abstract: The present invention provides a scatterfield microscopical measuring method and apparatus, which combine scatterfield detecting technology into microscopical device so that the microscopical device is capable of measuring the sample whose dimension is under the limit of optical diffraction. The scatterfield microscopical measuring apparatus is capable of being controlled to focus uniform and collimated light beam on back focal plane of an objective lens disposed above the sample. By changing the position of the focus position on the back focal plane, it is capable of being adjusted to change the incident angle with respect to the sample.

Abstract: A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.