Patents by Inventor Senthil Balasubramaniam

Senthil Balasubramaniam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7275408
    Abstract: Apparatus and method for simultaneously adjusting the gram load and radius geometry height of a head suspension by scanning a spring region of the head suspension with a laser beam. The incremental height difference between left and right legs of a spring region of the suspension may also be concurrently corrected. Apparatus and method for measuring the radius geometry height are provided by two or more non-contacting optical probes. A nitrogen atmosphere may be maintained in the region scanned.
    Type: Grant
    Filed: April 8, 2003
    Date of Patent: October 2, 2007
    Assignee: Hutchinson Technology Incorporated
    Inventors: Senthil Balasubramaniam, Trent A. Johnson, Derek J. Schanil, Roger W. Schmitz, Stephen P. Toperzer, Hryhory T. Koba, Timothy G. Rice, Paul E. Schwing, Blair M. Erickson, Mohamed Salah H. Khlif
  • Patent number: 7213433
    Abstract: A method for adjusting the static attitude of a head suspension by scanning a region of the head suspension with a laser. A head suspension having a gimbal region is provided that permits a head slider attached thereto to gimbal about pitch and roll axes in response to fluctuations in an air bearing over which the head slider flies. One or more predetermined regions of the head suspension are irradiated by a laser beam by scanning the laser beam across the head suspension regions to affect the static attitude of the head suspension. In a preferred embodiment, a plurality of parallel spaced apart lines are scanned on the leaf spring arms of a flexure with the laser to correct pitch errors in static attitude, and a plurality of parallel spaced apart lines are scanned with the laser in the cross section attached to the leaf spring arms to correct roll errors in static attitude. One or both sides of the head suspension can be scanned to create a desired pitch and/or roll correction.
    Type: Grant
    Filed: February 14, 2006
    Date of Patent: May 8, 2007
    Assignee: Hutchinson Technology Incorporated
    Inventors: Timothy Raymond Ubl, Senthil Balasubramaniam, Hryhory T. Koba
  • Publication number: 20060130552
    Abstract: A method for adjusting the static attitude of a head suspension by scanning a region of the head suspension with a laser. A head suspension having a gimbal region is provided that permits a head slider attached thereto to gimbal about pitch and roll axes in response to fluctuations in an air bearing over which the head slider flies. One or more predetermined regions of the head suspension are irradiated by a laser beam by scanning the laser beam across the head suspension regions to affect the static attitude of the head suspension. In a preferred embodiment, a plurality of parallel spaced apart lines are scanned on the leaf spring arms of a flexure with the laser to correct pitch errors in static attitude, and a plurality of parallel spaced apart lines are scanned with the laser in the cross section attached to the leaf spring arms to correct roll errors in static attitude. One or both sides of the head suspension can be scanned to create a desired pitch and/or roll correction.
    Type: Application
    Filed: February 14, 2006
    Publication date: June 22, 2006
    Applicant: Hutchinson Technology Incorporated
    Inventors: Timothy Ubl, Senthil Balasubramaniam, Hryhory Koba
  • Patent number: 7021097
    Abstract: A method for adjusting the static attitude of a head suspension by scanning a region of the head suspension with a laser. A head suspension having a gimbal region is provided that permits a head slider attached thereto to gimbal about pitch and roll axes in response to fluctuations in an air bearing over which the head slider flies. One or more predetermined regions of the head suspension are irradiated by a laser beam by scanning the laser beam across the head suspension regions to affect the static attitude of the head suspension. In a preferred embodiment, a plurality of parallel spaced apart lines are scanned on the leaf spring arms of a flexure with the laser to correct pitch errors in static attitude, and a plurality of parallel spaced apart lines are scanned with the laser in the cross section attached to the leaf spring arms to correct roll errors in static attitude. One or both sides of the head suspension can be scanned to create a desired pitch and/or roll correction.
    Type: Grant
    Filed: November 16, 2004
    Date of Patent: April 4, 2006
    Assignee: Hutchinson Technology Incorporated
    Inventors: Timothy Raymond Ubl, Senthil Balasubramaniam, Hryhory T. Koba
  • Patent number: 7012700
    Abstract: In certain aspects, the invention features scanning interferometry systems and methods that can scan an optical measurement surface over distances greater than a depth of focus of imaging optics in the interferometry system, while keeping an optical measurement surface in focus (i.e., maintaining an image of the optical measurement surface coincident with the detector). The optical measurement surface refers to a theoretical test surface in the path of test light in the interferometer that would reflect the test light to produce an optical path length difference (OPD) between it and reference light that is equal to a constant across a detector.
    Type: Grant
    Filed: June 17, 2003
    Date of Patent: March 14, 2006
    Assignee: Zygo Corporation
    Inventors: Peter J. De Groot, Xavier Colonna De Lega, Senthil Balasubramaniam
  • Patent number: 6837092
    Abstract: A method for adjusting the static attitude of a head suspension by scanning a region of the head suspension with a laser. A head suspension having a gimbal region is provided that permits a head slider attached thereto to gimbal about pitch and roll axes in response to fluctuations in an air bearing over which the head slider flies. One or more predetermined regions of the head suspension are irradiated by a laser beam by scanning the laser beam across the head suspension regions to affect the static attitude of the head suspension. In a preferred embodiment, a plurality of parallel spaced apart lines are scanned on the leaf spring arms of a flexure with the laser to correct pitch errors in static attitude, and a plurality of parallel spaced apart lines are scanned with the laser in the cross section attached to the leaf spring arms to correct roll errors in static attitude. One or both sides of the head suspension can be scanned to create a desired pitch and/or roll correction.
    Type: Grant
    Filed: February 10, 2000
    Date of Patent: January 4, 2005
    Assignee: Hutchinson Technology Incorporated
    Inventors: Timothy Raymond Ubl, Senthil Balasubramaniam, Hryhory T. Koba
  • Patent number: 6759669
    Abstract: A measurement device includes a laser or other light source for producing a light beam, and optics that split the light beam into a plurality of differentiable beam portions, such as a plurality of polarized beams. The optics also direct the differentiable beam portions toward a target to be measured. The measurement device also includes a detection component, such as a plurality of position sensitive detectors, positioned to intercept images created by simultaneous incidence of the differentiable beam portions on the target. The data collected by the detection component is used to calculate measurement data related to the target. When used with a head suspension target, displacement of various regions of the head suspension may be measured relative to a reference region, such as the mounting region of the head suspension.
    Type: Grant
    Filed: January 10, 2001
    Date of Patent: July 6, 2004
    Assignee: Hutchinson Technology Incorporated
    Inventors: Roger W. Schmitz, Senthil Balasubramaniam, Roger S. Posusta
  • Patent number: 6747267
    Abstract: A static attitude measurement device measures the static attitude of a target, such as a head suspension assembly or component, and reduces the possibility of measurement errors due to stray spots and internal reflections. The device includes a light source for producing a light beam, a beam splitter for directing the light beam toward the target from which a reflected beam is returned, a detector for detecting the reflected beam at a predetermined polarization state and a polarization component for producing the predetermined polarization state in the reflected beam, the polarization component positioned between the beam splitter and the target. The polarization component preferably is a quarter-wave plate to produce a reflected beam that is orthogonally polarized with respect to the incident beam. In addition, the directional optics preferably include a polarizer positioned between before the beam splitter to reduce reflection off of the light source.
    Type: Grant
    Filed: June 25, 2001
    Date of Patent: June 8, 2004
    Assignee: Hutchinson Technology Incorporated
    Inventor: Senthil Balasubramaniam
  • Publication number: 20040027576
    Abstract: In certain aspects, the invention features scanning interferometry systems and methods that can scan an optical measurement surface over distances greater than a depth of focus of imaging optics in the interferometry system, while keeping an optical measurement surface in focus (i.e., maintaining an image of the optical measurement surface coincident with the detector). The optical measurement surface refers to a theoretical test surface in the path of test light in the interferometer that would reflect the test light to produce an optical path length difference (OPD) between it and reference light that is equal to a constant across a detector.
    Type: Application
    Filed: June 17, 2003
    Publication date: February 12, 2004
    Inventors: Peter J. De Groot, Xavier Colonna De Lega, Senthil Balasubramaniam
  • Publication number: 20020088922
    Abstract: A measurement device includes a laser or other light source for producing a light beam, and optics that split the light beam into a plurality of differentiable beam portions, such as a plurality of polarized beams. The optics also direct the differentiable beam portions toward a target to be measured. The measurement device also includes a detection component, such as a plurality of position sensitive detectors, positioned to intercept images created by simultaneous incidence of the differentiable beam portions on the target. The data collected by the detection component is used to calculate measurement data related to the target. When used with a head suspension target, displacement of various regions of the head suspension may be measured relative to a reference region, such as the mounting region of the head suspension.
    Type: Application
    Filed: January 10, 2001
    Publication date: July 11, 2002
    Inventors: Roger W. Schmitz, Senthil Balasubramaniam, Roger S. Posusta