Patents by Inventor Senthil Kumar Srinivasan

Senthil Kumar Srinivasan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Guard cell for etching
    Patent number: 6060398
    Abstract: A method and apparatus for protecting a neighboring area that is adjacent to a first area that is to be etched. The method includes creating a guard cell substantially surrounding the first area, but excluding the neighboring area. The guard cell is formed of a material that is substantially selective to the etch process subsequently employed to etch within the first area. After the guard cell is formed, an etch is performed within the first area, while the guard cell prevents etching of the neighboring are outside the guard cell.
    Type: Grant
    Filed: March 9, 1998
    Date of Patent: May 9, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventors: Axel Christoph Brintzinger, Ravikumar Ramachandran, Senthil Kumar Srinivasan