Abstract: Lid moving systems and methods facilitate reliable and safe movement of lids for chambers. Such systems may include: (a) a base member; (b) side walls extending from the base member with each including a cam surface defined therein; (c) a lid mounting arm extending away from the base member; (d) a first pivotal connection system engaging the cam surfaces and pivotally engaging the lid mounting arm; (e) a traveler member including a recess or opening on a surface facing the base member; (f) a second pivotal connection system pivotally engaging the traveler member with the lid mounting arm; (g) a motor for moving the traveler member (causing movement of the lid mounting arm with respect to the side walls); and/or (h) a stopper mechanism extending into the recess or opening of the traveler member from a direction of the surface facing the base member when the lid is opened.

Abstract: Substrate processing systems have expanded substrate processing capabilities. In some examples, this may be accomplished by providing an inboard substrate handling chamber (e.g., with six facets or side walls) and an outboard substrate handling chamber (e.g., with five facets or side walls). The inboard substrate handling chamber may be connected with additional substrate processing chambers. The inboard substrate handling chamber may be connected to the outboard substrate handling chamber by an additional outboard load-lock module. These features enable a manufacturer to increase the number of substrate processing chambers in a substrate processing system or line.

Abstract: A load lock arrangement includes a load lock body having an upper plate member defining an upper accessory seat, an intermediate plate member spaced apart from the upper plate member and defining an intermediate accessory seat, and a lower plate member separated from the upper plate member by the intermediate plate member and defining a lower accessory seat. One of an upper heater and an upper accessory seat blanking plate is fixed to the upper accessory seat; one of an upper chill plate and an intermediate accessory seat blanking plate fixed to the intermediate accessory seat; and one of a lower chill plate, a lower heater, and a lower accessory seat blanking plate fixed to the lower accessory seat. Semiconductor processing systems, methods of making load lock arrangements, and material layer deposition methods are also described.

Abstract: A substrate storage rack for a semiconductor processing system includes a bottom plate, a top plate, and a column assembly. The top plate is spaced apart from the bottom plate, the column assembly connects the top plate to the bottom plate, and a ball member is compressively seated within the column assembly. The ball member protrudes from the column assembly in a direction toward the top plate to support a substrate within the substrate storage rack and on the ball member. Semiconductor processing systems and methods of making substrate storage racks are also described.

Abstract: Examples of a paper-clearance apparatus for removing jammed paper from a printer are described herein. The paper-clearance apparatus includes an outer shaft mounted transversely above a printing medium path of a printer; an inner shaft movably disposed inside the outer shaft; a roller assembly including a sliding bush mounted over the outer shaft; and a handle connected inside the inner shaft from outside a printer housing. The handle is being rotatable so that the roller connected with the inner shaft touches the jammed paper and rotates along with the jammed paper to grip the jammed paper. Further, the handle is being pullable away from the printer housing so as to pull out the jammed paper beneath the printer housing.

Abstract: Examples of a paper-clearance apparatus for removing jammed paper from a printer are described herein. The paper-clearance apparatus includes an outer shaft mounted transversely above a printing medium path of a printer; an inner shaft movably disposed inside the outer shaft; a roller assembly including a sliding bush mounted over the outer shaft; and a handle connected inside the inner shaft from outside a printer housing. The handle is being rotatable so that the roller connected with the inner shaft touches the jammed paper and rotates along with the jammed paper to grip the jammed paper. Further, the handle is being pullable away from the printer housing so as to pull out the jammed paper beneath the printer housing.

Abstract: A cap is positioned to contact a printhead when the printhead is not ejecting liquid ink. The cap and the printhead create a sealed space adjacent printhead nozzles when contacting each other. A flexible blade is positioned to contact the printhead when the printhead is not in contact with the cap. The flexible blade is adapted to fold over to spread a liquid solution on the nozzles in a first direction, and the flexible blade is adapted to remove excess amounts of the liquid solution from the nozzles in a second direction. A humidifier is connected to the cap and adapted to supply a moisture form of the liquid solution to the sealed space. A moisture sensor is connected to the cap. The humidifier is adapted to vary supply of the moisture to the sealed space based on the amount of moisture detected by the moisture sensor.

Abstract: Devices include one or more inkjet printheads, a reusable jetting sheet that is adjacent to nozzles of the printheads, support structures (e.g., drive rollers) contacting the sheet, and a cleaning station contacting the sheet. The reusable jetting sheet includes an opening, that is at least as large as the sets of nozzles, and a jetting area spaced from the opening. The support structures are adapted to move the reusable jetting sheet relative to the sets of nozzles. The inkjet printheads are adapted to eject ink from at least some of the nozzles, through the opening, to print media when the opening is positioned adjacent to the sets of nozzles, to print on print media. The inkjet printhead is further adapted to eject ink from at least some of the nozzles to the jetting area when the jetting area is positioned adjacent to the sets of nozzles to perform maintenance jetting.

Abstract: Devices include one or more inkjet printheads, a reusable jetting sheet that is adjacent to nozzles of the printheads, support structures (e.g., drive rollers) contacting the sheet, and a cleaning station contacting the sheet. The reusable jetting sheet includes an opening, that is at least as large as the sets of nozzles, and a jetting area spaced from the opening. The support structures are adapted to move the reusable jetting sheet relative to the sets of nozzles. The inkjet printheads are adapted to eject ink from at least some of the nozzles, through the opening, to print media when the opening is positioned adjacent to the sets of nozzles, to print on print media. The inkjet printhead is further adapted to eject ink from at least some of the nozzles to the jetting area when the jetting area is positioned adjacent to the sets of nozzles to perform maintenance jetting.

Abstract: A cap is positioned to contact a printhead when the printhead is not ejecting liquid ink. The cap and the printhead create a sealed space adjacent printhead nozzles when contacting each other. A flexible blade is positioned to contact the printhead when the printhead is not in contact with the cap. The flexible blade is adapted to fold over to spread a liquid solution on the nozzles in a first direction, and the flexible blade is adapted to remove excess amounts of the liquid solution from the nozzles in a second direction. A humidifier is connected to the cap and adapted to supply a moisture form of the liquid solution to the sealed space. A moisture sensor is connected to the cap. The humidifier is adapted to vary supply of the moisture to the sealed space based on the amount of moisture detected by the moisture sensor.