Patents by Inventor Seobum Lee

Seobum Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of controlling an etching process for forming fine patterns of a semiconductor device
    Patent number: 9397013
    Abstract: A method of controlling an etching process for forming fine patterns of a semiconductor device includes forming a lower pattern having a plurality of openings on a substrate, obtaining a width value of the lower pattern, and controlling a process recipe of an etching process for forming the lower pattern by using the width value.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: July 19, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chongkwang Chang, Sungwoo Kang, Chunghowan Kim, Youngmook Oh, Seobum Lee, Gahyun Lim
  • METHOD OF CONTROLLING AN ETCHING PROCESS FOR FORMING FINE PATTERNS OF A SEMICONDUCTOR DEVICE
    Publication number: 20160099185
    Abstract: A method of controlling an etching process for forming fine patterns of a semiconductor device includes forming a lower pattern having a plurality of openings on a substrate, obtaining a width value of the lower pattern, and controlling a process recipe of an etching process for forming the lower pattern by using the width value.
    Type: Application
    Filed: September 15, 2015
    Publication date: April 7, 2016
    Inventors: Chongkwang Chang, Sungwoo Kang, Chunghowan Kim, Youngmook Oh, Seobum Lee, Gahyun Lim