Abstract: An inkjet printhead and a manufacturing method thereof. The inkjet printhead includes a substrate, a substantially cylindrical ink chamber storing ink and formed in an upper portion of the substrate, and a manifold supplying ink to the ink chamber in a bottom portion of the substrate, a channel-forming layer disposed between the ink chamber and the manifold and having an ink channel communicating between the ink chamber and the manifold, a nozzle plate stacked on the substrate and having a nozzle at a location corresponding to the central part of the ink chamber, a heater formed to surround the nozzle of the nozzle plate, and electrodes electrically connected to the heater to supply current to the heater. Therefore, the quantity of ink stored in an ink chamber can be increased. Also, when bubbles grow, the cylindrical ink chamber confines an ink flow area to ink ejectors, thereby reducing a back flow of the ink.

Abstract: An ink-jet print head preventing thermal accumulation on a nozzle plate includes a substrate, a channel formed in the substrate to supply ink, a nozzle plate connected to the substrate and including a nozzle corresponding to the channel, a heat element formed in the nozzle plate to surround the nozzle, a thermal conduction layer formed on an upper side of the heat element formed between the thermal conduction layer and the heat element, and a thermal shunt spaced-apart from the heat element by a predetermined distance not to overlap the heat element in a direction parallel to the nozzle plate and connecting the thermal conduction layer to the substrate. Redundant heat generated from the heat element is not accumulated on a membrane of the nozzle plate but is rapidly absorbed into an inorganic thermal conduction layer formed in the membrane and is transferred to the bulk silicon substrate through a metallic thermal bridge, such as the thermal shunt.

Abstract: A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent.

Abstract: An ink-jet printhead includes a substrate; a doughnut-shaped heater formed on a top surface of the substrate; a nozzle plate stacked on the substrate, the nozzle plate having a nozzle through which ink is ejected; an ink chamber having a cavity enclosing the heater, the ink chamber communicating with the nozzle; and an ink passage extending through the substrate in a direction perpendicular to the surface of the heater. The ink passage includes a narrow passage and a wide passage which sequentially communicate with the ink chamber. The ink passage concentrically communicates with an opening at the center of the heater and the nozzle. The ink-jet printhead is monolithically manufactured for easy manufacturing, and since the introduction direction of ink into the ink chamber coincides with the ejection direction of ink from the nozzle, the ejection of ink can stably be performed.

Abstract: A bubble-jet type ink-jet printhead has a structure in which a base plate, a barrier wall, and a nozzle plate are stacked. The base plate includes a substrate on which a recess is formed to a predetermined depth, an adiabatic layer formed on the substrate, a heater which is formed on the adiabatic layer and generates a thermal energy, and a passivation layer which is formed on the heater and passivates the heater. The barrier wall is stacked on the base plate, defines an ink chamber, which is disposed on the recess and has a recessed bottom surface, and defines an ink passage which communicates with the ink chamber. The nozzle plate is stacked on the barrier wall, has nozzles through which ink is ejected, and is formed at a location corresponding to a center of the ink chamber.

Abstract: An ink-jet printhead includes a substrate, a doughnut-shaped heater formed on the top surface of the substrate, an ink chamber barrier disposed on the substrate to enclose the heater, an ink chamber defined by the substrate and the ink chamber barrier, and an ink passage extending through the substrate in the perpendicular direction to the surface of the heater. The ink passage includes a narrow passage and a wide passage. The narrow passage communicates with the ink chamber. The ink passage concentrically communicates with an opening formed at the center of the heater and a nozzle. An ink introducing direction for supplying the ink into the ink chamber coincides with an ink ejecting direction for ejecting the ink from the nozzle, and the ink chamber barrier is disposed between the substrate and the nozzle plate.