Abstract: A wafer cleaning method is provided. The wafer cleaning method includes providing a wafer on a stage that is inside of a chamber. The wafer is fixed to the stage by moving a grip pin connected to an edge of the stage. First ultrapure water is supplied onto the wafer while the wafer is rotating at a first rotation speed. The grip pin is released from the wafer by moving the grip pin. A development process is performed by supplying liquid chemical onto the wafer while the wafer is rotating at a second rotation speed that is less than the first rotation speed.

Abstract: The present invention provides a compound of chemical formula 1, a compound of chemical formula 3, compound [212], compound [224], or compound [228], a pharmaceutically acceptable salt thereof, a stereoisomer thereof, a hydrate thereof, or a solvate thereof, and a pharmaceutical composition comprising same. The pharmaceutical composition has excellent antiviral efficacy, thereby having a preventive or treatment effect on viral infectious disease such as SARS-COV-2, and exhibits an inhibitory effect on IL-5 expression and thus has a preventive or treatment effect on respiratory disease or allergic disease.

Abstract: Provided are novel cyclic phosphinate derivatives and a method of preparing the same, and more particularly, cyclic phosphinate derivatives including benzoxaphosphole oxide derivatives and benzoxaphosphorin oxide derivatives, and a method of preparing the same. The cyclic phosphinate derivative according to the present invention may have pharmacological and physiological activities, be used as the basic skeleton of the natural material, and be used in development of a new drug, and synthesis of various medicines. In addition, with the method of preparing a cyclic phosphinate derivative according to the present invention, various cyclic phosphinate derivatives may be prepared with high yield through a simple synthetic process by performing an intramolecular carbon-oxygen coupling reaction on the phosphinic acid derivative in the presence of a palladium (Pd) catalyst, an oxidant, and a base.

Abstract: Provided are novel cyclic phosphinate derivatives and a method of preparing the same, and more particularly, cyclic phosphinate derivatives including benzoxaphosphole oxide derivatives and benzoxaphosphorin oxide derivatives, and a method of preparing the same. The cyclic phosphinate derivative according to the present invention may have pharmacological and physiological activities, be used as the basic skeleton of the natural material, and be used in development of a new drug, and synthesis of various medicines. In addition, with the method of preparing a cyclic phosphinate derivative according to the present invention, various cyclic phosphinate derivatives may be prepared with high yield through a simple synthetic process by performing an intramolecular carbon-oxygen coupling reaction on the phosphinic acid derivative in the presence of a palladium (Pd) catalyst, an oxidant, and a base.

Abstract: Provided are novel cyclic phosphinate derivatives and a method of preparing the same, and more particularly, cyclic phosphinate derivatives including benzoxaphosphole oxide derivatives and benzoxaphosphorin oxide derivatives, and a method of preparing the same. The cyclic phosphinate derivative according to the present invention may have pharmacological and physiological activities, be used as the basic skeleton of the natural material, and be used in development of a new drug, and synthesis of various medicines. In addition, with the method of preparing a cyclic phosphinate derivative according to the present invention, various cyclic phosphinate derivatives may be prepared with high yield through a simple synthetic process by performing an intramolecular carbon-oxygen coupling reaction on the phosphinic acid derivative in the presence of a palladium (Pd) catalyst, an oxidant, and a base.

Abstract: Provided are novel cyclic phosphinate derivatives and a method of preparing the same, and more particularly, cyclic phosphinate derivatives including benzoxaphosphole oxide derivatives and benzoxaphosphorin oxide derivatives, and a method of preparing the same. The cyclic phosphinate derivative according to the present invention may have pharmacological and physiological activities, be used as the basic skeleton of the natural material, and be used in development of a new drug, and synthesis of various medicines. In addition, with the method of preparing a cyclic phosphinate derivative according to the present invention, various cyclic phosphinate derivatives may be prepared with high yield through a simple synthetic process by performing an intramolecular carbon-oxygen coupling reaction on the phosphinic acid derivative in the presence of a palladium (Pd) catalyst, an oxidant, and a base.