Patents by Inventor Seog-Hun Yoon

Seog-Hun Yoon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a fuse in a semiconductor device
    Patent number: 6686266
    Abstract: A method for forming a fuse pattern for repairing a bad cell includes forming a metal wiring pattern on a substrate and successively forming an insulating layer on the metal wiring pattern and the substrate. The insulating layer of a region for defining the fuse pattern is etched by using an etching gas including a fluorocarbon-type compound and a fluorosilicate-type compound, which substantially suppresses a generation of by-products. A partially exposed metal layer of the metal wiring pattern is removed to form a fuse. Accordingly, a structure such as a fence is not formed on the residue of insulating layer. Therefore, the removal process for the fence is unnecessary. As a result, the process for forming the fuse is simplified.
    Type: Grant
    Filed: July 5, 2002
    Date of Patent: February 3, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Hwan Ko, Seog-Hun Yoon, Jae-Hyun Park
  • Method for forming a fuse in a semiconductor device
    Publication number: 20030013289
    Abstract: A method for forming a fuse pattern for repairing a bad cell includes forming a metal wiring pattern on a substrate and successively forming an insulating layer on the metal wiring pattern and the substrate. The insulating layer of a region for defining the fuse pattern is etched by using an etching gas including a fluorocarbon-type compound and a fluorosilicate-type compound, which substantially suppresses a generation of by-products. A partially exposed metal layer of the metal wiring pattern is removed to form a fuse. Accordingly, a structure such as a fence is not formed on the residue of insulating layer. Therefore, the removal process for the fence is unnecessary. As a result, the process for forming the fuse is simplified.
    Type: Application
    Filed: July 5, 2002
    Publication date: January 16, 2003
    Inventors: Dong-Hwan Ko, Seog-Hun Yoon, Jae-Hyun Park