Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: The present disclosure relates to a method for treating a solvent in wastewater generated in a polycarbonate production process. More specifically, the present disclosure relates to a method for treating a solvent in wastewater generated in a polycarbonate production process, which can easily recover a high purity solvent regardless of the concentration of the solvent by using a membrane distillation method to reuse it, and contribute to energy savings.

Abstract: The present disclosure relates to a method for treating a solvent in wastewater generated in a polycarbonate production process. More specifically, the present disclosure relates to a method for treating a solvent in wastewater generated in a polycarbonate production process, which can easily recover a high purity solvent regardless of the concentration of the solvent by using a membrane distillation method to reuse it, and contribute to energy savings.