Abstract: A sensor device may include an environmental sensor configured to sense an environmental parameter and generate a signal representative thereof, a single pair ethernet (SPE) interface configured to cooperate with an SPE link, and a controller provided in communication with the environmental sensor and the SPE interface. The controller may be configured to receive the signal representative of the sensed environmental parameter and to control the SPE interface to generate at least one ethernet frame including data indicative of the sensed environmental parameter for transmission over the SPE link. The controller may be further configured to automatically configure communication with a remote server over the SPE link via the SPE interface.

Abstract: A sensor device may include an environmental sensor configured to sense an environmental parameter and generate a signal representative thereof, a single pair ethernet (SPE) interface configured to cooperate with an SPE link, and a controller provided in communication with the environmental sensor and the SPE interface. The controller may be configured to receive the signal representative of the sensed environmental parameter and to control the SPE interface to generate at least one ethernet frame including data indicative of the sensed environmental parameter for transmission over the SPE link. The controller may be further configured to automatically configure communication with a remote server over the SPE link via the SPE interface.

Abstract: A sensor device may include an environmental sensor configured to sense an environmental parameter and generate a signal representative thereof, a single pair ethernet (SPE) interface configured to cooperate with an SPE link, and a controller provided in communication with the environmental sensor and the SPE interface. The controller may be configured to receive the signal representative of the sensed environmental parameter and to control the SPE interface to generate at least one ethernet frame including data indicative of the sensed environmental parameter for transmission over the SPE link. The controller may be further configured to automatically configure communication with a remote server over the SPE link via the SPE interface.

Abstract: Provided is a method in which a difference between a surface temperature of a susceptor and a surface temperature of a substrate is accurately grasped without using a complicated high-priced equipment. A temperature control method for a chemical vapor deposition apparatus includes detecting a rotation state of a susceptor on which a substrate is accumulated on a top surface thereof, measuring a temperature of the top surface of the susceptor, calculating a temperature distribution of the top surface of the susceptor, based on the detected rotation state and the measured temperature, and controlling the temperature of the top surface of the susceptor, based on the calculated temperature distribution.

Abstract: Provided is a method in which a difference between a surface temperature of a susceptor and a surface temperature of a substrate is accurately grasped without using a complicated high-priced equipment. A temperature control method for a chemical vapor deposition apparatus includes detecting a rotation state of a susceptor on which a substrate is accumulated on a top surface thereof, measuring a temperature of the top surface of the susceptor, calculating a temperature distribution of the top surface of the susceptor, based on the detected rotation state and the measured temperature, and controlling the temperature of the top surface of the susceptor, based on the calculated temperature distribution.