Patents by Inventor Seok Min Bin

Seok Min Bin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of determining surface orientation of single crystal wafer
    Patent number: 9678023
    Abstract: Provided is a method of determining a surface orientation of a single crystal wafer. The method of determining a surface orientation of a single crystal wafer using high resolution X-ray rocking curve measurement may determine a surface angle of the wafer and a direction of the surface angle using rocking curve measurement of a high resolution X-ray diffraction method and measuring a misalignment angle formed by a rotation axis of a measuring apparatus and a surface normal of the wafer and an orientation of the misalignment angle.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: June 13, 2017
    Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
    Inventors: Chang Soo Kim, Seok Min Bin
  • METHOD OF DETERMINING SURFACE ORIENTATION OF SINGLE CRYSTAL WAFER
    Publication number: 20150330918
    Abstract: Provided is a method of determining a surface orientation of a single crystal wafer. The method of determining a surface orientation of a single crystal wafer using high resolution X-ray rocking curve measurement may determine a surface angle of the wafer and a direction of the surface angle using rocking curve measurement of a high resolution X-ray diffraction method and measuring a misalignment angle formed by a rotation axis of a measuring apparatus and a surface normal of the wafer and an orientation of the misalignment angle.
    Type: Application
    Filed: May 31, 2013
    Publication date: November 19, 2015
    Inventors: Chang Soo Kim, Seok Min Bin