Abstract: A method for producing a bis(fluorosulfonyl)imide lithium salt is disclosed. The method includes the steps of: (a) reacting bis(chlorosulfonyl)imide with NH4F(HF)n (n=0-10) to prepare ammonium bis(fluorosulfonyl)imide; and (b) reacting the ammonium bis(fluorosulfonyl)imide with a lithium base, wherein in at least one of steps (a) and (b), after the reaction, a process of adding an alkoxy trialkyl silane to the reaction solution to remove a fluorine anion is performed.

Abstract: A wafer polishing pad includes a first pad having a first surface configured to receive a platen. A protrusion is disposed on the first surface of the first pad. The protrusion is disposed on an edge region of the first pad in a plan view such that a side surface of the protrusion makes contact with a side surface of the platen when the first pad is disposed on the platen.

Abstract: A design validation system including a plurality of design validation devices receiving design data from a user and performing a simulation process to validate at least one of a plurality of product characteristics calculated from the design data and a simulation management device having simulation information about the characteristics required for a performance of the simulation process and transmitting the simulation information to the design validation devices upon request by the plurality of design validation devices, wherein the plurality of design validation devices simultaneously perform the simulation processes to validate the product characteristics.