Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: The present invention relates to a breathing support device for use in the event of a disaster such as a fire in a building or the like. The breathing support device includes: a connection pipe having any length; an induction pipe connected to one end of the connection pipe; and a supply pipe connected to the other end of the connection pipe, wherein an opening provided in the bottom of the induction pipe is combined with a mesh having a plurality of apertures which is fixed by a fastening piece, and a cover plate is combined to an opening of the supply pipe such that the interior of the supply pipe is sealed by the cover plate and one or more intake/exhaust pipes are combined to the cover plate such that the intake/exhaust pipes communicate to the interior of the supply pipe.

Abstract: The present invention relates to a tool for drawing which is capable of providing convenient painting representation of drawing such as a sketch, a study, cartoon, an independent drawing, and the like. The tool for drawing includes: a linear body; and a back-sight means which is formed in at least one point of the body and is perpendicular to the body. The tool for drawing greatly helps a user to sight a representation object of drawing precisely since the tool for drawing can be used as a reference to sight the representation to keep the tool for drawing always perpendicular to a direction at which eyes of the user points. In addition, the tool for drawing of the present invention has another advantage in that it can sight length, angle an so on of the representation object even more precisely and has a wide use for home life, construction and so on.