Patents by Inventor Seok Yan POH

Seok Yan POH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming alignment mark and resulting mark
    Patent number: 9136223
    Abstract: Methods for forming an alignment mark and the resulting mark are disclosed. Embodiments may include forming a first shape having rotational symmetry; forming a second shape; and forming an alignment mark by combining the first shape and one or more of the second shape, wherein the alignment mark has rotational symmetry.
    Type: Grant
    Filed: July 26, 2013
    Date of Patent: September 15, 2015
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Guoxiang Ning, Soon Yoeng Tan, Seok Yan Poh, Paul Ackmann
  • FORMING ALIGNMENT MARK AND RESULTING MARK
    Publication number: 20150028500
    Abstract: Methods for forming an alignment mark and the resulting mark are disclosed. Embodiments may include forming a first shape having rotational symmetry; forming a second shape; and forming an alignment mark by combining the first shape and one or more of the second shape, wherein the alignment mark has rotational symmetry.
    Type: Application
    Filed: July 26, 2013
    Publication date: January 29, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Guoxiang NING, Soon Yoeng TAN, Seok Yan POH, Paul ACKMANN