Abstract: Provided is an apparatus for treating a substrate, the apparatus including: an equipment front end module including a load port and a transfer frame; a process chamber for performing a process treatment on a substrate; and a load lock chamber disposed in a transfer path of the substrate transferred between the transfer frame and the process chamber, in which the load lock chamber includes: a housing having an interior space; a compartmentalizing plate for compartmentalizing the interior space into a first space, and a second space independent of the first space; and an aligning unit for aligning a notch of the substrate provided in any one of the first space and the second space.

Abstract: A power transfer system is constituted under a simple construction (a worm gear, transfer rod integrally installed with a worm sector gear, and lower control arm), thereby improving the efficiency of the power transfer of the toe-angle controlling mechanism for vehicle wheels. The worm gear and worm sector gear are closed in a cover part of a housing, acquiring the durability and reliability of the toe-angle controlling mechanism for the vehicle wheels. The toe angle is prevented from being varied according to the exterior force transmitted from the vehicle wheel, by a unique characteristic (no inverse-transfer power) of the worm gear and worm sector gear, thus improving the vehicle stability.

Abstract: An actuator assembly for a suspension is provided, in which a hinge unit is formed on an actuator and the actuator can be rotated according to a forward or backward movement of a rod, and thereby it is possible to prevent sliding at the joint of the lever and the actuator, thus to secure durability of the system.

Abstract: A power transfer system is constituted under a simple construction (a worm gear, transfer rod integrally installed with a worm sector gear, and lower control arm), thereby improving the efficiency of the power transfer of the toe-angle controlling mechanism for vehicle wheels. The worm gear and worm sector gear are closed in a cover part of a housing, acquiring the durability and reliability of the toe-angle controlling mechanism for the vehicle wheels. The toe angle is prevented from being varied according to the exterior force transmitted from the vehicle wheel, by a unique characteristic (no inverse-transfer power) of the worm gear and worm sector gear, thus improving the vehicle stability.

Abstract: An actuator assembly for a suspension is provided, in which a hinge unit is formed on an actuator and the actuator can be rotated according to a forward or backward movement of a rod, and thereby it is possible to prevent sliding at the joint of the lever and the actuator, thus to secure durability of the system.