Abstract: A support unit provided in an apparatus for treating a substrate using plasma includes a dielectric plate on which the substrate is placed, an electrode plate disposed under the dielectric plate, a power supply rod that applies power to the electrode plate, and a flange that has a shape surrounding the power supply rod and that is spaced apart from the power supply rod.

Abstract: Disclosed is a fluorine compound having perfluorostyrene introduced at a terminal thereof, as represented in the following Formula 1, and a coating solution and an optical waveguide device using the same, characterized in that the introduction of perfluorostyrene results in a facile fabrication of thin films by a UV curing or a thermal curing, high thermal stability and chemical resistance, and low optical propagation loss and birefringence: Wherein Z is O or S; RF is an aliphatic or aromatic group; y is a natural number of 1–10; y? is an integer of 0–1; x is an integer of 0–200; and Wherein B is a single bond or selected from the group consisting of —CO—, —SO2—, —S— and —O—, and Hal is selected from the group consisting of F, Cl, Br and I.

Abstract: Disclosed is a fluorine compound having perfluorostyrene introduced at a terminal thereof, as represented in the following Formula 1, and a coating solution and an optical waveguide device using the same, characterized in that the introduction of perfluorostyrene results in a facile fabrication of thin films by a UV curing or a thermal curing, high thermal stability and chemical resistance, and low optical propagation loss and birefringence: 1

Abstract: A method of fabricating a thermooptic tunable wavelength filter of optical communication systems using WDM is provided, which includes the steps of forming a polymer optical waveguide on a semiconductor substrate using a polymer material, forming a polymer Bragg grating on the optical waveguide using O2 RIE and polymer spin coating, and forming a thermooptic tuning electrode over the polymer optical waveguide in which the Bragg grating is integrated. This provides the thermooptical tunable wavelength filter which has very narrow wavelength band width of transmission signal, low crosstalk with optical signals adjacent thereto, stable wavelength tuning characteristic using thermooptic effect and wide tuning ranges. Furthermore, the optical devices using the polymer optical waveguide can be fabricated with low cost. Thus, they have advantages in terms of economy and marketability.

Abstract: An electro-optic polymer waveguide device capable of decreasing a driving voltage and an optical loss is disclosed. A vertical tapered waveguide is formed between passive waveguides of input and output portions in a waveguide and an electro-optic modulating region, and an amplitude of a waveguide mode of the input and output portion waveguide is equal to that of a optical fiber, thereby minimizing a connection loss with the optical fiber.

Abstract: An optical switch having reduced processing errors in a coupling region, according to the claimed invention includes an input portion having a pair of optical waveguides; an output portion having a pair of optical waveguides; a light phase shifting portion for inducing an additional phase change on light travelling in the input portion; a first light coupling waveguide for coupling between two light signals of the input portion and for providing a coupled signal with the light phase shifting portion; and a second light coupling waveguide for coupled between two light signals of the light phase shifting means and for providing a coupled signal with the output portion. The light coupling unit includes a waveguide. The switch reduces considerably any error that stems from manufacturing variations between waveguides in a coupling region since the waveguides share the error produced in a coupling region.

Abstract: Disclosed is an ultrafast optical switching device having two types of multiple quantum well structures to be connected with each other, the device comprising a semi-insulating substrate; and a first and a second multiple quantum well structure formed sequentially on the substrate and united with each other to produce a double-junction multiple quantum well structure. Each of the multiple quantum well structures has nonlinear optical effects and two life time constants present while switching off in the device. One of the life time constants corresponds to a short life time constant to be determined dependent on electrons in the double-junction multiple quantum well structure and the other of the life time constants corresponds to a long life time constant to be determined dependent on holes and lattices therein.

Abstract: Disclosed is an operation principle and an epitaxial structure of resonant tunneling opto-electronic device. According to the present invention, the photo-generated holes stored in front of the double barrier quantum well structure by light illumination. As a result, a large potential drop occurs in the double barrier quantum well structure. And a peak signal of the opto-electronic resonant tunneling device is generated at a relatively lower voltage illumination to one generated before introducing the light into the device. An amount of photocurrent is 10.sup.3 times and over as compared to the conventional p-i-n diode because a resonant tunneling current is optically controlled by light illumination. So that, it is possible to drive peripheral circuit without use of additional amplifiers for amplifying an output signal from the opto-electronic device.