Abstract: An etchant according to exemplary embodiments of the present invention includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.05 wt % to about 3 wt % of copper salt, about 0.1 wt % to about 10 wt % of organic acid or organic acid salt, and water.

Abstract: Exemplary embodiments of the present invention disclose a non-halogenated etchant for etching an indium oxide layer and a method of manufacturing a display substrate using the non-halogenated etchant, the non-halogenated etchant including nitric acid, sulfuric acid, a corrosion inhibitor including ammonium, a cyclic amine-based compound, and water.

Abstract: This invention comprises a sensor (40) having a slit-ray generator (41) and a camera (42), a calibration block (100) for calibrating 3-dimensional coordinate values, a computer (10) for processing 2-dimensional coordinate values of the calibration block (100) and the object (90) to obtain data of 3-dimensional space coordinate and output it to CRT (60), a robot hand (10) for moving the sensor (40) on multiple axes. Therefore, this invention can measure the section profile shape of a tire, etc. accurately and quickly.

Abstract: A robotic hand controls movement of a workpiece relative to three longitudinal axes in response to three control signals and relative to mutually perpendicular rotational axes .alpha. and .beta. in response to two control signals. Two C-shaped holders carry two motors having mutually perpendicular rotating shafts. Each holder includes two parallel flanges connected together by a web. The first motor is mounted on the first holder so its shaft extends between the first holder flanges. A second holder flange is mounted on the first motor shaft between the first holder flanges. The second motor is mounted on the second holder other flange. A carrier for the first holder responds to three of the signals which control movement of the first holder relative to the longitudinal axes.