Abstract: A lift pin module includes a lift pin which includes a head portion disposed at a first end of the lift pin, and a connecting portion disposed at a second end of the lift pin opposite to the first end, the head portion connected to a stage disposed inside a semiconductor process chamber, and the head portion extending in a first direction; an upper weight which includes a side surface with an opening extending in the first direction, the opening configured to receive the lift pin therein, and the upper weight surrounding the connecting portion of the lift pin; and a lower weight screwed to the upper weight, the lower weight disposed below the upper weight.

Abstract: A lift pin module includes a lift pin which includes a head portion disposed at a first end of the lift pin, and a connecting portion disposed at a second end of the lift pin opposite to the first end, the head portion connected to a stage disposed inside a semiconductor process chamber, and the head portion extending in a first direction; an upper weight which includes a side surface with an opening extending in the first direction, the opening configured to receive the lift pin therein, and the upper weight surrounding the connecting portion of the lift pin; and a lower weight screwed to the upper weight, the lower weight disposed below the upper weight.

Abstract: A dual mode satellite signal receiver capable of supporting at least two global navigation satellite systems and a satellite signal receiving method are provided. The dual mode satellite signal receiver comprises a frequency synthesizer for generating a local oscillator signal based on a reference frequency; a mixer for mixing the local oscillator signal with a satellite signal and outputting the mixed signal as a signal of an intermediate frequency band; a first filter for filtering the signal output from the mixer to reject an image signal and output only an actual signal; a second filter for filtering the actual signal to output only a predetermined bandwidth according to a positioning mode; and an amplifier for amplifying the second filter output signal to a predetermined level and outputting the amplified signal.

Abstract: A dual mode satellite signal receiver capable of supporting at least two global navigation satellite systems and a satellite signal receiving method are provided. The dual mode satellite signal receiver comprises a frequency synthesizer for generating a local oscillator signal based on a reference frequency; a mixer for mixing the local oscillator signal with a satellite signal and outputting the mixed signal as a signal of an intermediate frequency band; a first filter for filtering the signal output from the mixer to reject an image signal and output only an actual signal; a second filter for filtering the actual signal to output only a predetermined bandwidth according to a positioning mode; and an amplifier for amplifying the second filter output signal to a predetermined level and outputting the amplified signal.