Patents by Inventor Seonggil PARK

Seonggil PARK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 10465290
    Abstract: Disclosed is a substrate processing apparatus. The substrate processing apparatus comprises a process chamber providing an inner space where a substrate is treated, a support unit disposed in the inner space and supporting the substrate, and a gas supply unit providing the inner space with a process gas required for generating plasma. The support unit comprises a base having a top surface on which the substrate is placed, a heater disposed in the base, and a coating layer formed on the top surface of the base.
    Type: Grant
    Filed: March 24, 2017
    Date of Patent: November 5, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Minjong Kim, Seonggil Park, Jaebeom Park, Jung-soo Yoon, Keeyoung Jun, Choongrae Cho, Jongwon Hong
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20180051375
    Abstract: Disclosed is a substrate processing apparatus. The substrate processing apparatus comprises a process chamber providing an inner space where a substrate is treated, a support unit disposed in the inner space and supporting the substrate, and a gas supply unit providing the inner space with a process gas required for generating plasma. The support unit comprises a base having a top surface on which the substrate is placed, a heater disposed in the base, and a coating layer formed on the top surface of the base.
    Type: Application
    Filed: March 24, 2017
    Publication date: February 22, 2018
    Inventors: Minjong KIM, Seonggil PARK, Jaebeom PARK, Jung-soo YOON, Keeyoung JUN, Choongrae CHO, Jongwon HONG