Patents by Inventor Seong Hak CHEON

Seong Hak CHEON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200407380
    Abstract: According to the organometallic compound of the present invention and the thin film manufactured using the same, requirements of high volatility and excellent chemical/thermal stability are satisfied, and significantly improved thin-film deposition rates are exhibited even at low temperatures. In addition, property degradation due to by-products can be improved, excellent step coverage can be realized, and a thin film which, due to having a high dielectric constant, electrically satisfies the equivalent oxide thickness (EOT) requirement while having a thickness at which tunneling does not physically occur can be implemented.
    Type: Application
    Filed: January 25, 2019
    Publication date: December 31, 2020
    Applicant: Mecaro Co., Ltd.
    Inventors: Seung Won HA, Young Hun BYUN, Jeum Jong KIM, Ho Hoon KIM, Seong Hak CHEON