Abstract: The present invention has been made in an effort to more assuredly substitute oxygen in a vial. A gas substitution apparatus according to the exemplary embodiment of the present invention includes: a first gas substitution unit which seals a periphery of an opening of a vial disposed in a gas substitution section, and guides a flow of a first substitution gas to be supplied into the vial; and a second gas substitution unit which is coupled to an upper side of the first gas substitution unit, and guides a flow of a second substitution gas to be supplied directly into the vial.

Abstract: A substrate manufacturing apparatus comprises a transfer chamber, at least one process chamber disposed adjacent to a lateral face of the transfer chamber, and a substrate transfer module including at least two transfer robots which transfer a substrate to the process chamber, the substrate transfer module being disposed at the transfer chamber. Each of the at least two transfer robots comprises a blade including at least two supporters for supporting a substrate, an arm part connected to the blade to move the blade, and an arm driving part for driving the blade and the arm part.