Abstract: The present disclosure relates to an electric roaster equipped with a dual air purification and circulation system, wherein a suction fan consists of a first suction fan and a second suction fan disposed at both sides of a lower space of a roaster main body with an oil receiver, which is disposed under oil discharge nozzles of a roasting plate, disposed therebetween, the first suction fan forms a first air circulation flow by sucking air containing oil vapor, smoke, heat and odor generated at the top of the roasting plate through the oil discharge nozzles and supplying the air back to the top of the roasting plate through first discharge holes of a heat protection plate, the second suction fan forms a second air circulation flow by sucking air containing oil vapor, smoke, heat and odor generated at the top of the roasting plate through the oil discharge nozzles and supplying the air back to the top of the roasting plate through second discharge holes of the heat protection plate, and the air containing oil va

Abstract: A substrate processing apparatus includes a process chamber providing a reaction space therein and including a substrate entrance through which a substrate enters or exits, a susceptor disposed inside the process chamber and supporting the substrate, a gas injector disposed on an opposing surface to inject a gas toward the substrate, a valve opening and closing the substrate entrance, and a control electrode formed on the valve. The control electrode is vertically driven.

Abstract: The present invention relates to an electric grill comprising a purification and circulation system for removing oil mist and smoke and, more particularly, to an electric grill comprising a purification and circulation system for removing oil mist and smoke, wherein: a suction hole and a discharge hole are installed around a grill plate; air containing oil mist, smoke, heat, and smell is suctioned through the suction hole, the suctioned air containing, oil mist, smoke, heat, and smell is introduced into the lower portion of the grill by a suction fan, and comes into contact with water on the upper side of an oil pan containing the water, so as to remove the oil mist, smoke, heat, and smell contained therein, and then the purified air is circulated through the discharge hole installed around the grill plate; a filter is disposed so as to completely remove the oil mist, smoke, heat, and smell; and a Coanda air guide is installed so as to facilitate the contact between the oil mist, smoke, heat, and smell and th

Abstract: The present invention relates to an electric grill comprising a purification and circulation system for removing oil mist and smoke and, more particularly, to an electric grill comprising a purification and circulation system for removing oil mist and smoke, wherein: a suction hole and a discharge hole are installed around a grill plate; air containing oil mist, smoke, heat, and smell is suctioned through the suction hole, the suctioned air containing, oil mist, smoke, heat, and smell is introduced into the lower portion of the grill by a suction fan, and comes into contact with water on the upper side of an oil pan containing the water, so as to remove the oil mist, smoke, heat, and smell contained therein, and then the purified air is circulated through the discharge hole installed around the grill plate; a filter is disposed so as to completely remove the oil mist, smoke, heat, and smell; and a Coanda air guide is installed so as to facilitate the contact between the oil mist, smoke, heat, and smell and th

Abstract: In a plasma generating apparatus including a reaction chamber for providing a reaction space cut off from the outside; a plasma electrode installed at the outer upper portion of the reaction chamber, receiving high frequency power from the outside and generating plasma inside the reaction chamber; a grid horizontally installed to the reaction space, dividing the reaction space into an upper plasma generating space and a lower processing space and having plural through holes connecting the upper and lower spaces; an upper gas injector for providing gas to the plasma generating space; a lower gas injector for providing gas to the processing space; and a substrate supporting board installed to the processing space to be horizontally mounted with a substrate, by installing the grid in the reaction space, injecting inert gas through the upper gas injector and injecting process gas such as CxFy, etc. through the lower gas injector, a selective etching ratio of SiO2 can be improved.