Patents by Inventor Seong Ju WI

Seong Ju WI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD
    Publication number: 20230251568
    Abstract: Provided is a pellicle thermal durability evaluation device. The pellicle thermal durability evaluation device may comprise: a chamber; a pellicle holder which is disposed in the chamber and on which a pellicle is seated; a durability measurement unit including a temperature measurement module for measuring the temperature of the pellicle seated on the pellicle holder; and a light source unit which irradiates the pellicle by controlling the intensity of light according to the type of the pellicle seated on the pellicle holder.
    Type: Application
    Filed: March 7, 2023
    Publication date: August 10, 2023
    Applicant: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
    Inventors: Jin Ho AHN, Seong Ju WI, Yong Ju JANG