Patents by Inventor Seong-june Min

Seong-june Min has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing semiconductor device by correcting overlapping shots based on a radiation influenced pattern
    Patent number: 8458624
    Abstract: A method of manufacturing semiconductor devices is disclosed. The method includes determining fractured shots that do not overlap each other based on a final pattern; determining overlapping shots that are shots that overlap each other based on the final pattern; generating area difference data by comparing the areas of the overlapping shots and the fractured shots with each other; calculating a radiation influenced pattern based on the area difference data; and correcting the overlapping shots based on the radiation influenced pattern.
    Type: Grant
    Filed: July 27, 2011
    Date of Patent: June 4, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin Choi, Sang-hee Lee, Seong-june Min
  • Method for Manufacturing Semiconductor Devices
    Publication number: 20120047474
    Abstract: A method of manufacturing semiconductor devices is disclosed. The method includes determining fractured shots that do not overlap each other based on a final pattern; determining overlapping shots that are shots that overlap each other based on the final pattern; generating area difference data by comparing the areas of the overlapping shots and the fractured shots with each other; calculating a radiation influenced pattern based on the area difference data; and correcting the overlapping shots based on the radiation influenced pattern.
    Type: Application
    Filed: July 27, 2011
    Publication date: February 23, 2012
    Inventors: Jin Choi, Sang-hee Lee, Seong-june Min