Patents by Inventor Seong Moon HA

Seong Moon HA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature controller and a plasma-processing apparatus including the same
    Patent number: 10804120
    Abstract: A temperature controller of a plasma-processing apparatus including a heating unit and a cooling unit. The heating unit is configured to heat a liner on an inner surface of a plasma chamber in which a plasma is formed. The cooling unit is configured to cool the liner to controls a temperature of an upper electrode in the plasma chamber.
    Type: Grant
    Filed: July 18, 2017
    Date of Patent: October 13, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seong-Moon Ha, Min-Kyu Sung, Seung-Hee Cho, Seong-Chul Choi, Kyung-Sun Kim, Sang-Ho Lee
  • TEMPERATURE CONTROLLER AND A PLASMA-PROCESSING APPARATUS INCLUDING THE SAME
    Publication number: 20180174869
    Abstract: A temperature controller of a plasma-processing apparatus including a heating unit and a cooling unit. The heating unit is configured to heat a liner on an inner surface of a plasma chamber in which a plasma is formed. The cooling unit is configured to cool the liner to controls a temperature of an upper electrode in the plasma chamber.
    Type: Application
    Filed: July 18, 2017
    Publication date: June 21, 2018
    Inventors: SEONG-MOON HA, Min-Kyu SUNG, Seung-Hee CHO, Seong-Chul CHOI, Kyung-Sun KIM, Sang-Ho LEE
  • UPPER ELECTRODE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS HAVING THE SAME
    Publication number: 20170178868
    Abstract: An upper electrode for a plasma processing apparatus includes a body portion having a plurality of through-holes, a showerhead disposed below the body portion and having a plurality of jet holes connected to the plurality of through-holes, and a buffer layer interposed between the body portion and the showerhead.
    Type: Application
    Filed: August 26, 2016
    Publication date: June 22, 2017
    Inventors: Seong Moon HA, Kyung Sun KIM, Kang Min JEON