Abstract: A method for forming integral heat sinks on back surfaces of integrated circuit devices at wafer level is described. A first metallic layer is deposited over the back surface of a wafer. A second metallic layer is deposited over the first metallic layer. Optionally, a third metallic layer is deposited over the second metallic layer. The first metallic layer, the second metallic layer, and optionally the third metallic layer form the integral heat sink for the wafer. When the wafer is diced into multiple semiconductor devices, each semiconductor device has an integral heat sink formed on its back surface that includes the first metallic layer, the second metallic layer, and optionally the third metallic layer. Optionally, each semiconductor device is connected to a lead frame via solder bumps or bonding wires to form an integrated circuit (IC) package.