Abstract: Disclosed are a material for spray for plasma spray coating having high plasma resistance and a method for producing the same. The material for plasma spray comprises an yttrium compound, and the numbers of moles of Y (yttrium), O (oxygen), and F (fluorine) in the yttrium compound satisfy 1.5<(O+F)/Y<2.0.

Abstract: Disclosed are a material for plasma spray coating having high plasma resistance and a method for producing the same. The method includes: feeding yttrium compound into an air plasma jet; melting the yttrium compound; and cooling droplets of the molten yttrium compound.

Abstract: Proposed are a slurry composition for suspension plasma thermal spray, a preparation method therefor, and a suspension plasma thermal spray coating film. When the slurry composition is used to form a thermal spray coating film, the thermal spray coating film can be stably applied to applications used in a corrosive environment because no changes occur in content of oxygen and fluorine in the thermal spray coating film. In addition, when forming the coating film, since various crystal structures can be formed under control, the coating film can be used in various environments requiring corrosion resistance. In addition, the slurry composition can inhibit formation of cracks and pores that frequently occur in existing thermal spray coating films, thereby allowing for formation of a denser thermal spray coating film than the existing thermal spray coating film.

Abstract: Disclosed herein is a method of manufacturing a plasma-resistant coating film. The method includes (1) forming a lower coating layer through a thermal spray process, on a base member, from a first rare earth metal compound powder including 90 to 99.9 wt % of first rare earth metal compound particles and 0.1 to 10 wt % of silica (SiO2) particles, (2) processing the surface of the lower coating layer formed in step (1) to have an average surface roughness of 1 to 6 ?m, and (3) forming an upper coating layer through a suspension plasma spray process, on the lower coating layer which is surface-treated in step (2), from second rare earth metal compound particles, to obtain a structurally dense and chemically stable plasma-resistant coating film with improved plasma resistance.

Abstract: The proposed is a manufacturing method for a high-density YF3 coating layer by high-velocity oxygen fuel spraying (HVOF). More particularly, proposed is a manufacturing method for a high-density YF3 coating layer by HVOF, in which YF3 powder is melted and quenched to form densified spherical YF3 particles and then the YF3 particles are applied by HVOF to form a high-density YF3 coating layer with improved mechanical properties and plasma resistance.

Abstract: Proposed is a method for manufacturing a spherical YOF-based powder. Specifically, proposed is a method for manufacturing a spherical YOF-based powder. The YOF-based powder injected into the plasma jet and melted into the refrigerant in a droplet state is sprayed and quenched, thereby improving density and controlling the component ratio through particle spheroidization.

Abstract: The present disclosure relates to an yttrium-based granular powder for thermal spraying. More particularly, the yttrium-based granular powder is a mixture including one or more yttrium compound powders selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3, and a silica (SiO2) powder. A Y—Si—O intermediate phase is included therein in a content of less than 10 wt %. The thermal spray coating manufactured using the same has a low porosity, and forms a very dense thin film, thus ensuring excellent plasma resistance.

Abstract: Proposed is a method of producing an yttrium-based thermal spray coating. The method includes forming a coating on a substrate by atmospheric plasma spraying of an yttrium-based granular powder including at least one yttrium compound powder selected from the group consisting of Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3, and a silica (SiO2) powder. The yttrium-based granular powder includes less than 10 w % of a Y—Si—O mesophase. Then yttrium-based thermal spray coating can exhibit low porosity, high density, and excellent plasma resistance.

Abstract: The present disclosure relates to an yttrium-based granular powder for thermal spraying. More particularly, the yttrium-based granular powder is a mixture including one or more yttrium compound powders selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3, and a silica (SiO2) powder. A Y—Si—O intermediate phase is included therein in a content of less than 10 wt %. The thermal spray coating manufactured using the same has a low porosity, and forms a very dense thin film, thus ensuring excellent plasma resistance.