Abstract: A substrate analysis apparatus is provided. The substrate analysis includes: an interlayer conveying module configured to transport a first FOUP; an exchange module which is connected to the interlayer conveying module, and configured to transfer a wafer from the first FOUP to a second FOUP; a pre-processing module configured to form a test wafer piece using the wafer inside the second FOUP; an analysis module configured to analyze the test wafer piece; and a transfer rail configured to transport the second FOUP containing the wafer and a tray containing the test wafer piece. The wafer includes a first identifier indicating information corresponding to the wafer, the test wafer piece includes a second identifier indicating information generated by the pre-processing module which corresponds to the test wafer piece, and the analysis module is configured to analyze the first identifier and the second identifier in connection with each other.

Abstract: A surface-treated inorganic nanoparticle includes a core including Mania (TiO2); a shell surrounding the core, and including zirconia(ZrO2); and a dispersant including a phosphate functional group, and connected to the shell,

Abstract: Provided are a vehicle sensor cleaning apparatus and a control method thereof. The vehicle sensor cleaning apparatus includes a liquid sprayer configured to spray washer fluid on at least one sensor arranged in a vehicle, an air sprayer configured to spray air on the at least one sensor, a liquid controller configured to control washer fluid spraying of the liquid sprayer, and an air controller configured to control air spraying of the air sprayer.

Abstract: The inventive concept provides a substrate treating method. The substrate treating method includes taking in a substrate to a treating space to mount on a support unit; upwardly moving the support unit after mounting the substrate on the support unit; determining whether the support unit moves normally after the upwardly moving the support unit; and treating the substrate by generating a plasma in the treating space, and wherein at the determining whether the support unit moves normally, before the plasma is generated at the treating space at the treating the substrate, whether a pulse distance matching a predetermined distance data according to a pulse value of a driving unit which pulse-moves a moving body which moves the support unit in a top/down direction, matches a movement distance of the moving body is determined, and an interlock is generated if the pulse distance and the movement distance is different.

Abstract: A vibration device for an excavator, including: an external body having an accommodation section inside thereof; a main vibration body being embedded in the external body and having a mounting bracket, formed at the bottom, for detaching and attaching tools and equipment; and a sliding apparatus being installed between one side surface of the main vibration body and the external body, wherein the main vibration body is a box-like body which consists of a plurality of supporting plates so as to have a space in the inside thereof; a reduction gear which is connected to a hydraulic motor and which rotates and operates by means of the drive of the hydraulic motor; a first eccentric member being engaged with the reduction gear and performs an eccentric operation; and a second eccentric member being engaged with the first eccentric member and performs an eccentric operation.

Abstract: A panel driving method for maintaining constant color temperature over time, comprising determining gains for red (R), green (G), and blue (B) phosphors and adjusting input R, G, and B values using the determined gains. The gains for R, G, and B phosphors may be determined according to brightness attenuation characteristics of R, G, and B phosphors versus used time of a panel. The brightness attenuation characteristics of R, G, and B phosphors may also be obtained using a phosphor attenuation characteristic as a function of time. Alternatively, the brightness attenuation characteristics of R, G, and B phosphors may be obtained referring to stored data. The levels input to the R, G, and B phosphors are determined on the basis of an attenuation characteristic of a phosphor having a greatest attenuation rate.