Patents by Inventor SEONG-DAE CHOI

SEONG-DAE CHOI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS DISTRIBUTING MEANS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
    Publication number: 20110214812
    Abstract: A substrate processing apparatus includes a process chamber having a chamber lid and a chamber body to provide a reaction space and a gas distributing means including a plate and an injection part in the process chamber. The injection part includes a plurality of through holes in the plate and a discharge portion capable of being in fluid communication with the plurality of through holes. The discharge portion has a matrix shape and provides a space where a plasma is discharged. The apparatus additionally includes a susceptor in the process chamber. The susceptor faces the gas distributing means.
    Type: Application
    Filed: March 8, 2011
    Publication date: September 8, 2011
    Applicant: JUSUNG ENGINEERING CO., LTD.
    Inventors: MYUNG-GON SONG, JUNG-RAK LEE, JAE-CHUL DO, BU-IL JEON, SEONG-DAE CHOI