Abstract: An apparatus for measuring thickness includes: a chamber; a sound wave transmitter transmitting a sound wave in the chamber; a sound wave receiver receiving the sound wave transmitted from the sound wave transmitter in the chamber; and a supporter between the sound wave transmitter and the sound wave receiver.

Abstract: A method and a deposition apparatus of fabricating a display device is disclosed. The method may include providing a target substrate in an internal space of a chamber of a deposition apparatus, depositing a first material which includes an organic material and a deposition material coupled to each other, on the target substrate to form preliminary deposition layer, performing a preliminary decomposition step to remove the organic material, and performing a decomposition step to remove the organic material remained in the preliminary deposition layer and to form a deposition layer. The preliminary decomposition step may include heating the preliminary deposition layer, and the decomposition step may include injecting a second material containing an organic solvent onto the preliminary deposition layer.

Abstract: An apparatus for monitoring polishing includes a substrate transferring unit configured to transfer a substrate including at least one inorganic layer along a first direction; a polishing unit on the substrate transferring unit; a cleaning unit and a drying unit on the substrate transferring unit; and a monitoring unit on the substrate transferring unit, the monitoring unit including a plurality of optical probes configured to measure reflected lights reflected from respective ones of a plurality of different positions of the substrate. The polishing unit, the cleaning unit, the drying unit, and the monitoring unit are sequentially located along the first direction.

Abstract: A method and a deposition apparatus of fabricating a display device is disclosed. The method may include providing a target substrate in an internal space of a chamber of a deposition apparatus, depositing a first material which includes an organic material and a deposition material coupled to each other, on the target substrate to form preliminary deposition layer, performing a preliminary decomposition step to remove the organic material, and performing a decomposition step to remove the organic material remained in the preliminary deposition layer and to form a deposition layer. The preliminary decomposition step may include heating the preliminary deposition layer, and the decomposition step may include injecting a second material containing an organic solvent onto the preliminary deposition layer.

Abstract: An apparatus for measuring thickness includes: a chamber; a sound wave transmitter transmitting a sound wave in the chamber; a sound wave receiver receiving the sound wave transmitted from the sound wave transmitter in the chamber; and a supporter between the sound wave transmitter and the sound wave receiver.