Abstract: An ion depth profile control method includes performing reinforcement learning, whereby a similarity between an ion depth profile and a box profile is output as a reward when the similarity is equal to or greater than a set criterion, the ion depth profile being an ion concentration according to a wafer depth in an ion implantation process, and the box profile being a target profile, obtaining at least one process condition of the ion implantation process as a result of the reinforcement learning, and generating a process recipe regarding the at least one process condition.

Abstract: An ion depth profile control method includes performing reinforcement learning, whereby a similarity between an ion depth profile and a box profile is output as a reward when the similarity is equal to or greater than a set criterion, the ion depth profile being an ion concentration according to a wafer depth in an ion implantation process, and the box profile being a target profile, obtaining at least one process condition of the ion implantation process as a result of the reinforcement learning, and generating a process recipe regarding the at least one process condition.

Abstract: A separation distance is maintained between a leading elevator car (14) and a trailing elevator car (12) traveling in the same direction in an elevator hoistway (16). A shortest stopping distance (dssl) of the leading elevator car (14) and a normal stopping distance (dnst) of the trailing elevator car (12) are determined. The separation distance (dsep) is controlled such that a difference between the normal stopping distance (dnst) of the trailing elevator car (12) and the shortest stopping distance (dssl) of the leading elevator car (14) is greater than or equal to a threshold distance (dthresh).

Abstract: The movement of a plurality of elevator cars (12, 14) in an elevator hoistway (16) is coordinated for situations in which the regions of the hoistway that are serviceable by the cars (12, 14) at any given time are configured to overlap. A car stop plan for each elevator car (12, 14) is generated that includes a sequence of stops for servicing demand assigned to the elevator car (12, 14). Operation of the elevator cars (12, 14) is then coordinated based on the car stop plans such that each elevator car (12, 14) services its assigned demand without interfering with the car stop plans of any other of the plurality of elevator cars (12, 14).

Abstract: The movement of a plurality of elevator cars (12, 14) in an elevator hoistway (16) is coordinated for situations in which the regions of the hoistway that are serviceable by the cars (12, 14) at any given time are configured to overlap. A car stop plan for each elevator car (12, 14) is generated that includes a sequence of stops for servicing demand assigned to the elevator car (12, 14). Operation of the elevator cars (12, 14) is then coordinated based on the car stop plans such that each elevator car (12, 14) services its assigned demand without interfering with the car stop plans of any other of the plurality of elevator cars (12, 14).

Abstract: A separation distance is maintained between a leading elevator car (14) and a trailing elevator car (12) traveling in the same direction in an elevator hoistway (16). A shortest stopping distance (dssl) of the leading elevator car (14) and a normal stopping distance (dnst) of the trailing elevator car (12) are determined. The separation distance (dsep) is controlled such that a difference between the normal stopping distance (dnst) of the trailing elevator car (12) and the shortest stopping distance (dssl) of the leading elevator car (14) is greater than or equal to a threshold distance (dthresh).