Patents by Inventor Seo Rim MOON

Seo Rim MOON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical proximity correction method and method of fabricating mask including the same
    Patent number: 11599017
    Abstract: An optical proximity correction method includes extracting first patterns from a pattern mask, performing lithography on at least a part of the first patterns to form first-first patterns, forming the first-first patterns at positions where the first patterns are formed, and performing correction on the pattern mask on which the first-first patterns are formed.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: March 7, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Soo Yong Lee, Seo Rim Moon, Kyung Jae Park, Soo Ryong Lee, Kang-Min Jung
  • OPTICAL PROXIMITY CORRECTION METHOD AND METHOD OF FABRICATING MASK INCLUDING THE SAME
    Publication number: 20210325773
    Abstract: An optical proximity correction method includes extracting first patterns from a pattern mask, performing lithography on at least a part of the first patterns to form first-first patterns, forming the first-first patterns at positions where the first patterns are formed, and performing correction on the pattern mask on which the first-first patterns are formed.
    Type: Application
    Filed: November 19, 2020
    Publication date: October 21, 2021
    Inventors: Soo Yong LEE, Seo Rim MOON, Kyung Jae PARK, Soo Ryong LEE, Kang-Min JUNG