Abstract: An integrated circuit device is provided. The integrated circuit device includes: a bit line on a substrate, the bit line including a lower conductive layer and an upper conductive layer; an insulating capping pattern on the bit line; and a main insulating spacer on a sidewall of the bit line and a sidewall of the insulating capping pattern, the main insulating spacer including an extended portion that is convex toward the upper conductive layer.

Abstract: An integrated circuit device includes: a substrate including a plurality of active regions; a bit line extending on the substrate in a horizontal direction; a direct contact connected between a first active region selected among the plurality of active regions and the bit line; an inner oxide layer contacting a sidewall of the direct contact; and a carbon-containing oxide layer nonlinearly extending on a sidewall of the bit line in a vertical direction, the carbon-containing oxide layer contacting the sidewall of the bit line.

Abstract: An integrated circuit device includes: a substrate including a plurality of active regions; a bit line extending on the substrate in a horizontal direction; a direct contact connected between a first active region selected among the plurality of active regions and the bit line; an inner oxide layer contacting a sidewall of the direct contact; and a carbon-containing oxide layer nonlinearly extending on a sidewall of the bit line in a vertical direction, the carbon-containing oxide layer contacting the sidewall of the bit line.

Abstract: A semiconductor memory device includes a substrate with a cell array region, a first interface region, and a second interface region, the cell array region being provided with active regions, bit lines on the cell array region and the second interface region, dielectric patterns on top surfaces of the bit lines and extending along the top surfaces of the bit lines and further extending onto the first interface region, a device isolation pattern on the substrate, and including a first portion on the cell array region and a second portion on the first interface region, the first portion defining the active regions, the second portion being provided with first recesses, and each first recess being disposed between two adjacent dielectric patterns, and first sacrificial semiconductor patterns disposed on the first interface region and in the first recesses. The first sacrificial semiconductor patterns include polycrystalline silicon.

Abstract: A semiconductor memory device includes a substrate with a cell array region, a first interface region, and a second interface region, the cell array region being provided with active regions, bit lines on the cell array region and the second interface region, dielectric patterns on top surfaces of the bit lines and extending along the top surfaces of the bit lines and further extending onto the first interface region, a device isolation pattern on the substrate, and including a first portion on the cell array region and a second portion on the first interface region, the first portion defining the active regions, the second portion being provided with first recesses, and each first recess being disposed between two adjacent dielectric patterns, and first sacrificial semiconductor patterns disposed on the first interface region and in the first recesses. The first sacrificial semiconductor patterns include polycrystalline silicon.

Abstract: An integrated circuit device includes: a substrate including a plurality of active regions; a bit line extending on the substrate in a horizontal direction; a direct contact connected between a first active region selected among the plurality of active regions and the bit line; an inner oxide layer contacting a sidewall of the direct contact; and a carbon-containing oxide layer nonlinearly extending on a sidewall of the bit line in a vertical direction, the carbon-containing oxide layer contacting the sidewall of the bit line.

Abstract: An integrated circuit device is provided. The integrated circuit device includes: a bit line on a substrate, the bit line including a lower conductive layer and an upper conductive layer; an insulating capping pattern on the bit line; and a main insulating spacer on a sidewall of the bit line and a sidewall of the insulating capping pattern, the main insulating spacer including an extended portion that is convex toward the upper conductive layer.