Abstract: A temperature controller includes a bath for containing a refrigerant. One cooling line has one end connected to the bath and the other end branching off into a plurality of diverged lines. The first diverged line is connected to an edge portion of an object. The second diverged line is connected to a middle portion of the object. The third diverged line is connected to a central portion of the object. A plurality of valves for controlling flux of the refrigerant are mounted on inlets of the plurality of diverged lines, respectively. A plurality of temperature sensors for detecting temperatures of the refrigerant are mounted on outlets of the plurality of diverged lines, respectively. A controller controls opening angles of the plurality of valves in accordance with the detected temperatures of the refrigerant.