Patents by Inventor Seow Yeun Yee

Seow Yeun Yee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS structure with graphene component
    Patent number: 10053358
    Abstract: A microelectromechanical systems (MEMS) structure includes a substrate, an epitaxial polysilicon cap located above the substrate, a first cavity portion defined between the substrate and the epitaxial polysilicon cap, and a first graphene component having at least one graphene surface immediately adjacent to the first cavity portion.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: August 21, 2018
    Assignee: Robert Bosch GmbH
    Inventors: Gary Yama, Seow Yeun Yee, Franz Laermer, Ashwin Samarao
  • MEMS Structure with Graphene Component
    Publication number: 20180057351
    Abstract: A microelectromechanical systems (MEMS) structure includes a substrate, an epitaxial polysilicon cap located above the substrate, a first cavity portion defined between the substrate and the epitaxial polysilicon cap, and a first graphene component having at least one graphene surface immediately adjacent to the first cavity portion.
    Type: Application
    Filed: August 31, 2016
    Publication date: March 1, 2018
    Inventors: Gary Yama, Seow Yeun Yee, Franz Laermer, Ashwin Samarao