Abstract: A method of fabricating a high-frequency piezoelectric resonator includes the steps of (a) forming a region of reduced thickness in a central portion of a quartz disk, a step zone being formed at the transition between the thinned region and the non-thinned region; (b) depositing a conductive tongue on the step so as to extend over a portion of the non-thinned region and over a portion of the thinned region; (c) mounting two lead attachments on the disk; and (d) depositing first and second electrodes on the disc, each electrode coupled to a respective one of the lead attachments, a portion of the first electrode being deposited on the conductive tongue.

Abstract: The high-frequency piezoelectric resonator comprises a quartz plate or disk having a region of reduced thickness which forms a diaphragm and is joined to the remainder of the plate or disk by means of a zone forming a step. A conductive electrode extends from the exterior of the disk or plate to the center of the thinned region and is provided with a conductive tongue constituted by a metallic film-layer of controlled thickness and disposed in the stepped zone. The method involves formation of the disk or plate by ion machining whereas the electrodes and the conductive tongue are formed by the sputtering technique.