Patents by Inventor Serge Spirkovitch

Serge Spirkovitch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultra-thin ionizing radiation detector and methods for making same
    Patent number: 6259099
    Abstract: Ultra-thin ionizing radiation detector, and processes of manufacturing such detector. The detector includes a stack made up of a substrate, an insulting layer and a thin superficial layer of silicon, a detection diode being fabricated in the superficial layer.
    Type: Grant
    Filed: September 18, 1998
    Date of Patent: July 10, 2001
    Assignee: Commissariat a l'Energie Atomique
    Inventors: François Foulon, Serge Spirkovitch, Lionel Babadjian
  • Force measurement sensor integrated on silicon, and a method of manufacture
    Patent number: 4873868
    Abstract: A mechanical magnitude sensor integrated on silicon, and a method of manufacture. The sensor comprises a bendably deformable conductive blade (4) whose free end (43) constitutes the first plate of a variable capacitor whose fixed second plate (24) is constituted by a conductive zone formed on the silicon substrate. A JFET type structure is formed in the vicinity of the anchor point (41) of the blade (4) with a gate zone (21) situated beneath the anchor portion (41) and with drain and source zones (22, 23) being provided on either side of the gate zone (21) in order to amplify a signal representative of variations in the position of the flexible blade (4). The sensor may be used as an accelerometer or as a pressure sensor.
    Type: Grant
    Filed: February 9, 1988
    Date of Patent: October 17, 1989
    Assignee: Metravib R.D.S.
    Inventors: Andre Pierre, Francois Batllteu, Jean-Pierre Brosselard, Alfred Permuy, Francois-Xavier Pirot, Serge Spirkovitch