Patents by Inventor Sergei E. Syssoev

Sergei E. Syssoev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate alignment apparatus comprising a controller to measure alignment during transport
    Patent number: 7880155
    Abstract: A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: February 1, 2011
    Assignee: Brooks Automation, Inc.
    Inventors: Alexander G. Krupyshev, Sergei E. Syssoev
  • Substrate alignment apparatus
    Publication number: 20070290150
    Abstract: A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.
    Type: Application
    Filed: June 15, 2006
    Publication date: December 20, 2007
    Inventors: Alexander G. Krupyshev, Sergei E. Syssoev