Patents by Inventor Sergei G. Bakarian

Sergei G. Bakarian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Extracting comprehensive design guidance for in-line process control tools and methods
    Patent number: 9400865
    Abstract: Methods and systems for extracting comprehensive design guidance for in-line process control of wafers are provided. One method includes automatically identifying potential marginalities in a design for a device to be formed on a wafer. The method also includes automatically generating information for the potential marginalities. The automatically generated information is used to set up process control for the wafer.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: July 26, 2016
    Assignee: KLA-Tencor Corp.
    Inventors: Sagar A. Kekare, Sergei G. Bakarian
  • Extracting Comprehensive Design Guidance for In-Line Process Control Tools and Methods
    Publication number: 20150363537
    Abstract: Methods and systems for extracting comprehensive design guidance for in-line process control of wafers are provided. One method includes automatically identifying potential marginalities in a design for a device to be formed on a wafer. The method also includes automatically generating information for the potential marginalities. The automatically generated information is used to set up process control for the wafer.
    Type: Application
    Filed: June 10, 2015
    Publication date: December 17, 2015
    Inventors: Sagar A. Kekare, Sergei G. Bakarian