Patents by Inventor SERGEI KLIMOVICH

SERGEI KLIMOVICH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Showerhead for providing multiple materials to a process chamber
    Patent number: 11970775
    Abstract: Embodiments of a showerhead are described herein. In some embodiments, a showerhead assembly includes: a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from the first body and defining a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes; and a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from the second body and defining a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across a width of the showerhead assembly and a heat sink disposed between the plurality of first tubes and the plurality of second tubes.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: April 30, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Prashanth Kothnur, Satish Radhakrishnan, Alexander Lerner, Sergei Klimovich, Roey Shaviv
  • SHOWERHEAD FOR PROVIDING MULTIPLE MATERIALS TO A PROCESS CHAMBER
    Publication number: 20200048767
    Abstract: Embodiments of a showerhead are described herein. In some embodiments, a showerhead assembly includes: a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from the first body and defining a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes; and a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from the second body and defining a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across a width of the showerhead assembly and a heat sink disposed between the plurality of first tubes and the plurality of second tubes.
    Type: Application
    Filed: August 6, 2019
    Publication date: February 13, 2020
    Inventors: PRASHANTH KOTHNUR, SATISH RADHAKRISHNAN, ALEXANDER LERNER, SERGEI KLIMOVICH, ROEY SHAVIV