Patents by Inventor Sergei Lyuksyutov

Sergei Lyuksyutov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of polymer nanolithography
    Patent number: 7431970
    Abstract: An atomic force microscopy polymer nanolithography method is described. The method of the present invention enables rapid creation of raised or depressed features in a polymer film. The features are generated by mass transport of polymer within an initially uniform, planar film via localized softening of attoliters of polymer by Joule heating. This localized softening of the polymer is accomplished by current flow between the AFM tip and a conductive wafer upon which the layer of polymer is mounted.
    Type: Grant
    Filed: March 25, 2004
    Date of Patent: October 7, 2008
    Assignee: United States of America as represented by the Secretary of the Air Force
    Inventors: Sergei Lyuksyutov, Shane Juhl, Richard Vaia