Patents by Inventor Sergei Nicolaevich Chvalun

Sergei Nicolaevich Chvalun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polyparaxylylene film, production method therefor and semiconductor device
    Patent number: 6946405
    Abstract: An organic polymer film of low dielectric constant and high heating resistance which is applicable as an insulating layer of a semiconductor devices is provided, as well as a manufacturing method for the film and a semiconductor device incorporating the film.
    Type: Grant
    Filed: July 22, 2002
    Date of Patent: September 20, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Akio Takahashi, Yuichi Satsu, Yoshiko Nakai, Igor Yefimovich Kardash, Andrei Vladimirovich Pebalk, Sergei Nicolaevich Chvalun, Karen Andranikovich Mailyan, Harukazu Nakai