Patents by Inventor Sergei Zotov
Sergei Zotov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10247554Abstract: The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.Type: GrantFiled: September 23, 2015Date of Patent: April 2, 2019Assignee: The Regents of the University of CaliforniaInventors: Doruk Senkal, Sergei A. Zotov, Andrei M. Shkel
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Patent number: 9696340Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.Type: GrantFiled: February 19, 2016Date of Patent: July 4, 2017Assignee: The Regents of the University of CaliforniaInventors: Alexander A. Trusov, Sergei A. Zotov, Andrei M. Shkel
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Publication number: 20160169935Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.Type: ApplicationFiled: February 19, 2016Publication date: June 16, 2016Inventors: Alexander A. Trusov, Sergei A. Zotov, Andrei M. Shkel
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Patent number: 9296133Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.Type: GrantFiled: March 20, 2013Date of Patent: March 29, 2016Assignee: The Regents of the University of CaliforniaInventors: Andrei M. Shkel, Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov
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Publication number: 20160084654Abstract: The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.Type: ApplicationFiled: September 23, 2015Publication date: March 24, 2016Inventors: Doruk Senkal, Sergei A. Zotov, Andrei M. Shkel
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Patent number: 9274136Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.Type: GrantFiled: January 28, 2013Date of Patent: March 1, 2016Assignee: The Regents of the University of CaliforniaInventors: Alexander A. Trusov, Sergei A. Zotov, Andrei M. Shkel
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Patent number: 8991247Abstract: A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.Type: GrantFiled: October 21, 2011Date of Patent: March 31, 2015Assignee: The Regents of the University of CaliforniaInventors: Alexander Trusov, Sergei Zotov, Andrei Shkel
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Publication number: 20140208823Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, in put rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.Type: ApplicationFiled: January 28, 2013Publication date: July 31, 2014Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Alexander A. Trusov, Sergei A. Zotov, Andrei M. Shkel
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Patent number: 8567247Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.Type: GrantFiled: September 29, 2010Date of Patent: October 29, 2013Assignee: The Regents of the University of CaliforniaInventors: Andrei M. Shkel, Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov
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Publication number: 20130098153Abstract: A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.Type: ApplicationFiled: October 21, 2011Publication date: April 25, 2013Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Alexander Trusov, Sergei Zotov, Andrei Shkel
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Patent number: 8368154Abstract: An apparatus is fabricated with a plurality of semiconductor-device substrates and/or MEMS substrates with micromachined sensors, circuits, transducers, and/or MEMS devices fabricated on the plurality of substrates. A plurality of flexible hinges couple the plurality of substrates into a substantially flat two dimensional foldable assembly. Electrical interconnects coupled to the sensors, circuits, transducers, and/or MEMS devices extend other ones of the plurality of substrates. The foldable assembly of substrates is assembled or folded into a three dimensional polyhedral structure with the plurality of substrates configured in three dimensions to form defined relative orientations in space with respect to each other. The invention includes a wafer scale method of fabricating the apparatus.Type: GrantFiled: February 9, 2011Date of Patent: February 5, 2013Assignee: The Regents of the University of CaliforniaInventors: Alexander Trusov, Montgomery C. Rivers, Sergei A. Zotov, Andrei M. Shkel
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Publication number: 20120032286Abstract: An apparatus is fabricated with a plurality of semiconductor-device substrates and/or MEMS substrates with micromachined sensors, circuits, transducers, and/or MEMS devices fabricated on the plurality of substrates. A plurality of flexible hinges couple the plurality of substrates into a substantially flat two dimensional foldable assembly. Electrical interconnects coupled to the sensors, circuits, transducers, and/or MEMS devices extend other ones of the plurality of substrates. The foldable assembly of substrates is assembled or folded into a three dimensional polyhedral structure with the plurality of substrates configured in three dimensions to form defined relative orientations in space with respect to each other. The invention includes a wafer scale method of fabricating the apparatus.Type: ApplicationFiled: February 9, 2011Publication date: February 9, 2012Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Alexander Trusov, Montgomery C. Rivers, Sergei A. Zotov, Andrei M. Shkel
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Publication number: 20110239763Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.Type: ApplicationFiled: September 29, 2010Publication date: October 6, 2011Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Andrei M. Shkel, Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov