Patents by Inventor Sergel Rodin

Sergel Rodin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • First approximation for OPC significant speed-up
    Patent number: 6854104
    Abstract: An optical proximity correction system for local correction of an aerial image produced from a mask having transmissive portions and blocking portions collectively defining a target design includes an analyzer to match one or more segments of the target design to one or more typical case segments from a predetermined set of typical case segments; a controller, coupled to the analyzer, for approximating each of the one or more segments of the target design with matching typical case segments from the set of typical case segments to produce an adjusted aerial image.
    Type: Grant
    Filed: November 27, 2002
    Date of Patent: February 8, 2005
    Assignee: LSI Logic Corporation
    Inventors: Stanislav Aleshin, Marina Medvedeva, Jaroslav Kalinin, Sergel Rodin
  • First approximation for OPC significant speed-up
    Publication number: 20040103388
    Abstract: An optical proximity correction system for local correction of an aerial image produced from a mask having transmissive portions and blocking portions collectively defining a target design includes an analyzer to match one or more segments of the target design to one or more typical case segments from a predetermined set of typical case segments; a controller, coupled to the analyzer, for approximating each of the one or more segments of the target design with matching typical case segments from the set of typical case segments to produce an adjusted aerial image.
    Type: Application
    Filed: November 27, 2002
    Publication date: May 27, 2004
    Inventors: Stanislav Aleshin, Marina Medvedeva, Jaroslav Kalinin, Sergel Rodin