Patents by Inventor Sergey Georgiyevich BELOSTOTSKIY

Sergey Georgiyevich BELOSTOTSKIY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
    Publication number: 20230073259
    Abstract: A baseplate for a substrate support includes a heater layer configured to selectively heat the baseplate and a heat spreader disposed between the heater layer and an upper surface of the baseplate. The heat spreader is configured to distribute heat provided by the heater layer throughout the baseplate. The baseplate includes a first material that has a first coefficient of thermal expansion (CTE) and a first thermal conductivity. The heat spreader includes a second material that has a second CTE and a second thermal conductivity greater than the first thermal conductivity.
    Type: Application
    Filed: February 17, 2021
    Publication date: March 9, 2023
    Inventors: Ramesh CHANDRASEKHARAN, Karl Frederick LEESER, Christopher GAGE, Seshu NIMMALA, Ramkishan Rao LINGAMPALLI, Joel HOLLINGSWORTH, Vincent BURKHART, William LAFFERTY, Sergey Georgiyevich BELOSTOTSKIY