Patents by Inventor Sergey Grinberg

Sergey Grinberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POLISHING TOOL WITH DIAPHRAM FOR UNIFORM POLISHING OF A WAFER
    Publication number: 20140174655
    Abstract: A chemical mechanical polishing to that can provide uniform polishing across a wafer even when polishing hard wafers such as AlTiC wafers used in the formation of magnetic recording sliders. The chemical mechanical polishing to has a wafer carrier that includes a diaphragm or bladder that is configured such that an inner portion of the bladder can be pneumatically pressurized so as to bow outward, while outer portions remain unpressurized.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: HGST NETHERLANDS B.V.
    Inventors: Sergey Grinberg, David A. Hansen, Tom K. Harris, III, Junsheng Yang, Honglin Zhu