Patents by Inventor Sergey Latinski

Sergey Latinski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System, method and computer program product for evaluating an actual structural element of an electrical circuit
    Patent number: 9047532
    Abstract: A method, a system and a computer program product for evaluating an actual structural element of an electrical circuit. The method includes: detecting an actual structural element contour by processing a scanning electron microscope image of the actual structural element; aligning the actual structural element contour with a simulated contour to provide an aligned actual structural element contour; wherein the simulated contour is obtained by simulating a lithographic process that is responsive to a design contour; and comparing between the aligned actual structural element contour and reference information.
    Type: Grant
    Filed: January 24, 2008
    Date of Patent: June 2, 2015
    Assignee: APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Ovadya Menadeva, Sergey Latinski
  • SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR EVALUATING AN ACTUAL STRUCTURAL ELEMENT OF AN ELETRICAL CIRCUIT
    Publication number: 20080183323
    Abstract: A method, a system and a computer program product for evaluating an actual structural element of an electrical circuit. The method includes: detecting an actual structural element contour by processing a scanning electron microscope image of the actual structural element; aligning the actual structural element contour with a simulated contour to provide an aligned actual structural element contour; wherein the simulated contour is obtained by simulating a lithographic process that is responsive to a design contour; and comparing between the aligned actual structural element contour and reference information.
    Type: Application
    Filed: January 24, 2008
    Publication date: July 31, 2008
    Inventors: Ovadya Menadeva, Sergey Latinski