Patents by Inventor Sergey YAKUNIN

Sergey YAKUNIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10416101
    Abstract: A method of measuring properties of a thin film stack by GIXR divides the stack into sub-layers and represents the composition of each sub-layer by an number P. The numbers P represent the composition of each layer. For example, integers may represent pure material and fractional values represent mixtures of the adjacent pure materials. This representation is then used to fit to measured data and the best fit gives an indication of the material composition of each of the sub-layers and hence as a function of depth.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: September 17, 2019
    Assignee: Malvern Panalytical B.V.
    Inventors: Igor Alexandrovich Makhotkin, Sergey Yakunin
  • Publication number: 20180180561
    Abstract: A method of measuring properties of a thin film stack by GIXR divides the stack into sub-layers and represents the composition of each sub-layer by an number P. The numbers P represent the composition of each layer. For example, integers may represent pure material and fractional values represent mixtures of the adjacent pure materials. This representation is then used to fit to measured data and the best fit gives an indication of the material composition of each of the sub-layers and hence as a function of depth.
    Type: Application
    Filed: December 22, 2017
    Publication date: June 28, 2018
    Inventors: Igor Alexandrovich MAKHOTKIN, Sergey YAKUNIN