Patents by Inventor Sergey Yulin

Sergey Yulin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monochromator mirror for the EUV-spectral range
    Patent number: 7173759
    Abstract: The invention relates to a monochromator mirror for the EUV-spectral range, provided with a layer arrangement placed on a substrate, comprising a periodic sequence of two individual layers (A, B) made of different material forming a period having a thickness d in the form of a spacer-layer or an absorber-layer, whereby the reflectivity of the second or a higher Bragg-order is used. Said thickness d has a dimensional deviation of a maximum of 3% and the ratio of the layer thickness of the absorber-layer to the period thickness is smaller than the ratio of 0.8 of the used order of the Bragg-Reflexion.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: February 6, 2007
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, Sergey Yulin
  • Monochromator mirror for the euv-spectral range
    Publication number: 20050128571
    Abstract: The invention relates to a monochromator mirror for the EUV-spectral range, provided with a layer arrangement placed on a substrate, comprising a periodic sequence of two individual layers (A, B) made of different material forming a period having a thickness d in the form of a spacer-layer or an absorber-layer, whereby the reflectivity of the second or a higher Bragg-order is used. Said thickness d has a dimensional deviation of a maximum of 3% and the ratio of the layer thickness of the absorber-layer to the period thickness is smaller than the ratio of 0.8 of the used order of the Bragg-Reflexion.
    Type: Application
    Filed: February 21, 2003
    Publication date: June 16, 2005
    Inventors: Torsten Feigl, Norbert Kaiser, Thomas Kuhlmann, Sergey Yulin